公开(公告)号：WO2022233547A1

公开(公告)日：2022-11-10

申请号：PCT/EP2022/059799

申请日：2022-04-12

Applicant: ASML NETHERLANDS B.V.

Inventor： UEBEL, Patrick, Sebastian ,  PONGERS, Willem, Richard ,  SMEETS, Ralph, Jozef, Johannes, Gerardus, Anna, Maria ,  ABDOLVAND, Amir ,  PUTHANKOVILAKAM, Krishnaparvathy

IPC: G02B6/00 ,  G03F1/00 ,  G02F1/365 ,  G02B6/02 ,  C03B37/012 ,  G03F7/20 ,  B82Y20/00

Abstract: In this document a monolithic optical element for generating broadband radiation upon receiving input radiation at an input end of the optical element is disclosed, the optical element comprising: a hollow core region for guiding the input radiation along a longitudinal axis of the optical element towards and output end of the optical element; a cladding region surrounding the core region along the longitudinal axis and comprising transversally arranged micro-structures configured to provide non-linear optical behaviour to the optical element causing the generation of the broadband radiation; and a supporting region surrounding the cladding region along the longitudinal axis of at least part of the optical element, characterized in that the supporting region has a transversal dimension which is sufficiently large to render said at least part of the optical element substantially rigid.