公开(公告)号：WO2022106161A1

公开(公告)日：2022-05-27

申请号：PCT/EP2021/079725

申请日：2021-10-26

Applicant: ASML NETHERLANDS B.V.

Inventor： NIHTIANOV, Stoyan ,  KANAI, Kenichi ,  RAMACHANDRA RAO, Padmakumar

IPC: H01J37/244 ,  G01T1/24

Abstract: A detector may be provided for a charged particle apparatus comprising: a sensing element including a diode; and a circuit configured to detect an electron event caused by an electron impacting the sensing element, wherein the circuit comprises a voltage monitoring device and a reset device, wherein the reset device is configured to regularly reset the diode by setting a voltage across the diode to a predetermined value, and wherein the voltage monitoring device is connected to the diode to monitor a voltage across the diode in between resets.