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公开(公告)号：WO2022058131A1
公开(公告)日：2022-03-24
申请号：PCT/EP2021/073423
申请日：2021-08-24
Applicant: ASML NETHERLANDS B.V.
Inventor： SIMMONS, Rodney, D.
IPC: H05G2/00
Abstract: A pressure vessel is configured to retain a fluid that includes tin. The pressure vessel includes a liner made of molybdenum, the liner defining a liner cavity that retains the tin fluid and is in contact with the tin fluid, and a pressure bearing shell defining a shell cavity in which the liner is fixed. The pressure bearing shell is made of a material having a coefficient of thermal expansion that matches a coefficient of thermal expansion of the molybdenum.
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