公开(公告)号：WO2019076525A1

公开(公告)日：2019-04-25

申请号：PCT/EP2018/073792

申请日：2018-09-05

Applicant: ASML NETHERLANDS B.V.

Inventor： BOLDER, Joost, Johan ,  HEIJMANS, Peter, Michel, Silvester, Maria ,  VAN DUIVENBODE, Jeroen ,  VRENKEN, Ruud, Hubertus, Silvester

IPC: G03F7/20 ,  H02K41/03 ,  H02K41/035 ,  H02P6/00 ,  H02K3/28 ,  G05B19/416

Abstract: The invention relates to a motor (LD) comprising: • a stationary part (STP), comprising: • a row of coil assemblies (UCA,LCA), the coil assemblies having multiple phases, • a movable part (MP), comprising: • a row of permanent magnets (UPM,LPM), wherein the row of coil assemblies has a first length and the row of permanent magnets has a second length, wherein the second length is smaller than the first length, wherein the coil assemblies are arranged to interact with permanent magnets aligned with the coil assemblies to generate a driving force, • a comparator to compare a position measurement signal representative for an actual position of the movable part with a set- point signal representative for a desired position of the movable part to provide an error signal; • a motion feedback controller configured to provide a control signal on the basis of the error signal; at least one current amplifier configured to provide an actuation signal to the coil assemblies on the basis of the control signal, • wherein the motor comprises a feedforward device, wherein the feedforward device is configured to provide a current amplifier feedforward signal on the basis of the set-point signal, or a derivative thereof, wherein the current amplifier feedforward signal is provided to the at least one current amplifier to compensate for unbalanced back electromotive forces on one or more of the coil assemblies due to the one or more coil assemblies being only partly aligned with the permanent magnets.