公开(公告)号：WO2020141031A1

公开(公告)日：2020-07-09

申请号：PCT/EP2019/082625

申请日：2019-11-26

Applicant: ASML NETHERLANDS B.V.

Inventor： REN, Weiming ,  ZHANG, Qian ,  HU, Xuerang ,  LIU, Xuedong

IPC: H01J37/147

Abstract: A micro-structure deflector array (622) is disclosed. The micro-structure deflector array includes a plurality of multipole structures (622-1 to 622-47). The micro-deflector deflector array comprises a first multipole structure (622-26,..., 622-47) having a first radial shift from a central axis of the array and a second multipole structure (622-1) having a second radial shift from the central axis of the array. The first radial shift is larger than the second radial shift, and the first multipole structure comprises a greater number of pole electrodes than the second multipole structure to reduce deflection aberrations when the plurality of multipole structures deflects a plurality of charged particle beams. The micro-structure deflector array may be included in an improved source conversion unit of a multi-beam inspection apparatus.