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1.发明申请
公开(公告)号：WO2023061688A1
公开(公告)日：2023-04-20
申请号：PCT/EP2022/075525
申请日：2022-09-14
Applicant: ASML NETHERLANDS B.V.
Inventor： ZHU, Xuechen , TAZESH, Farshid , ZHANG, Datong , REN, Weiming
IPC: H01J37/244
Abstract: Some embodiments are related to a method of or apparatus for forming an image of a buried structure that includes: emitting primary charged particles from a source; receiving a plurality of secondary charged particles from a sample; and forming an image based on received secondary charged particles that have an energy within a first range.
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