公开(公告)号：WO2011073170A1

公开(公告)日：2011-06-23

申请号：PCT/EP2010/069587

申请日：2010-12-14

Applicant: Danmarks Tekniske Universitet ,  KUSANO, Yukihiro

Inventor： KUSANO, Yukihiro

IPC: H05H1/24 ,  H05H1/48

CPC classification number: H05H1/48

Abstract: The invention relates to an apparatus for treating a surface with a at least one gliding arc source comprising at least one gas flow controlling unit (104); and a set of electrodes (102); wherein the at least one gas flow controlling unit (104) and the set of electrodes (102) are controlled to provide a plasma comprising a gas temperature at the set of electrodes (102) above approximately 2000 K. In this way, an optimal or substantially optimal plasma for treating surfaces of samples is achieved.

Abstract translation: 本发明涉及一种用至少一个滑动电弧源处理表面的装置，包括至少一个气流控制单元（104）; 和一组电极（102）; 其中所述至少一个气体流量控制单元（104）和所述电极组（102）被控制以提供等离子体，所述等离子体包括高于大约2000K的电极组（102）处的气体温度。以这种方式， 实现了用于处理样品表面的基本上最佳的等离子体。

公开(公告)号：WO2008138901A1

公开(公告)日：2008-11-20

申请号：PCT/EP2008/055773

申请日：2008-05-09

Applicant: Force Technology ,  Forskningscenter Risø ,  KREBS, Niels ,  BARDENSHTEIN, Alexander ,  KUSANO, Yukihiro ,  BINDSLEV, Henrik ,  MORTENSEN, Henrik Junge

Inventor： KREBS, Niels ,  BARDENSHTEIN, Alexander ,  KUSANO, Yukihiro ,  BINDSLEV, Henrik ,  MORTENSEN, Henrik Junge

IPC: H05H1/46

CPC classification number: H01J37/32321 ,  C23C16/4415 ,  H05H1/2475 ,  H05H2001/2493 ,  Y10T428/31

Abstract: This invention relates to a plasma surface modification process (and a corresponding a system) of a solid object (100) comprising creating plasma (104) by a plasma source (106), application of the plasma (104) to at least a part of a surface (314) of the solid object (100), generating ultrasonic high intensity and high power acoustic waves (102) by at least one ultrasonic high intensity and high power acoustic wave generator (101 ), wherein the ultrasonic acoustic waves are directed to propagate towards said surface (314) of the object (100) so that a laminar boundary layer (313) of a gas or a mixture of gases (500) flow in contact with said solid object (100) is thinned or destructed for at least a part of said surface (314). In this way, the plasma can more efficiently access and influence the surface of the solid object to be treated by the plasma, which speeds the process time up significantly.

Abstract translation: 本发明涉及固体物体（100）的等离子体表面改性方法（和相应的系统），包括通过等离子体源（106）产生等离子体（104），将等离子体（104）施加至至少一部分 固体物体（100）的表面（314），通过至少一个超声波高强度和高功率声波发生器（101）产生超声波高强度和高功率声波（102），其中超声波被引向 朝向物体（100）的所述表面（314）传播，使得与所述固体物体（100）流动的气体或气体混合物（500）的层流边界层（313）被稀释或破坏至少 所述表面（314）的一部分。 以这种方式，等离子体可以更有效地访问和影响待等待处理的固体物体的表面，这显着地加快了处理时间。