EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT

    公开(公告)号:WO2020146436A1

    公开(公告)日:2020-07-16

    申请号:PCT/US2020/012641

    申请日:2020-01-08

    Abstract: Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

    HIGH VOLTAGE TRANSFORMER
    2.
    发明申请
    HIGH VOLTAGE TRANSFORMER 审中-公开
    高压变压器

    公开(公告)号:WO2017095890A1

    公开(公告)日:2017-06-08

    申请号:PCT/US2016/064164

    申请日:2016-11-30

    Abstract: A high-voltage transformer is disclosed. The high-voltage transformer includes a transformer core; at least one primary winding wound once or less than once around the transformer core; a secondary winding wound around the transformer core a plurality of times; an input electrically coupled with the primary windings; and an output electrically coupled with the secondary windings that provides a voltage greater than 1, 1200 volts. In some embodiments, the high-voltage transformer has a stray inductance of less than 30 nH as measured on the primary side and the transformer has a stray capacitance of less than 100 pF as measured on the secondary side.

    Abstract translation: 公开了一种高压变压器。 高压变压器包括变压器芯; 至少一个初级绕组围绕变压器磁芯缠绕一次或少于一次; 围绕变压器铁心多次缠绕的次级绕组; 与所述初级绕组电耦合的输入; 以及与次级绕组电耦合的输出,其提供大于1,1200伏特的电压。 在一些实施例中,高压变压器在初级侧上测量的杂散电感小于30nH,并且变压器在次级侧上测量的杂散电容小于100pF。

    ANALOG INTEGRATOR SYSTEM AND METHOD
    3.
    发明申请
    ANALOG INTEGRATOR SYSTEM AND METHOD 审中-公开
    模拟集成系统和方法

    公开(公告)号:WO2014197611A1

    公开(公告)日:2014-12-11

    申请号:PCT/US2014/040929

    申请日:2014-06-04

    CPC classification number: G06G7/18

    Abstract: Systems and methods are disclosed to integrate signals. Some embodiments include an integrator comprising an active input; a passive input; a first integrator having a first integrator input and a first integrator output; a second integrator having a second integrator input and a second integrator output; a first plurality of switches coupled with the first integrator input, the second integrator input, the active input, and the passive input; a second plurality of switches coupled with the first integrator output and the second integrator output; and a controller. The controller may be configured to control the operation of the first plurality of switches to switch the active input between the first integrator input and the second integrator input, and control the operation of the first plurality of switches to switch the passive input between the first integrator input and the second integrator input.

    Abstract translation: 公开了系统和方法来集成信号。 一些实施例包括包括有源输入的积分器; 被动输入 具有第一积分器输入和第一积分器输出的第一积分器; 具有第二积分器输入和第二积分器输出的第二积分器; 与第一积分器输入,第二积分器输入,有源输入和无源输入耦合的第一多个开关; 与第一积分器输出和第二积分器输出耦合的第二多个开关; 和控制器。 控制器可以被配置为控制第一多个开关的操作以在第一积分器输入和第二积分器输入之间切换有效输入,并且控制第一多个开关的操作以在第一积分器之间切换无源输入 输入和第二个积分器输入。

    NANOSECOND PULSER BIAS COMPENSATION WITH CORRECTION

    公开(公告)号:WO2021097459A1

    公开(公告)日:2021-05-20

    申请号:PCT/US2020/060799

    申请日:2020-11-16

    Abstract: Some embodiments include a high voltage pulsing circuit comprising: a high voltage pulsing power supply; a transformer electrically coupled with the high voltage pulsing power supply; an output electrically coupled with the transformer and configured to output high voltage pulses with an amplitude greater than 1 kV and a pulse repetition frequency greater than 1 kHz; a bias compensation circuit arranged in parallel with the output the bias compensation circuit comprising; first inductance comprising the inductive elements and any stray inductance between the bias compensation circuit and the high voltage pulsing power supply; and second inductance comprising the inductive elements and any stray inductance between the bias compensation circuit and the output.

    HIGH VOLTAGE INDUCTIVE ADDER
    6.
    发明申请

    公开(公告)号:WO2018126223A1

    公开(公告)日:2018-07-05

    申请号:PCT/US2017/069119

    申请日:2017-12-29

    Abstract: A high voltage inductive adder is disclosed. In some embodiments, the high voltage inductive adder comprising a first adder circuit and a second adder circuit. The first adder circuit including a first source; a first switch electrically coupled with the first source; a first transformer core; and a first plurality of primary windings wound about the first transformer core and electrically coupled with the first switch. The second adder circuit including a second source; a second switch electrically coupled with the second source; a second transformer core; and a second plurality of primary windings wound about the second transformer core and electrically coupled with the second switch. The high voltage inductive adder comprising one or more secondary windings wound around both the first transformer core and the second transformer core and an output coupled with the plurality of secondary windings.

    HIGH VOLTAGE NANOSECOND PULSER WITH VARIABLE PULSE WIDTH AND PULSE REPETITION FREQUENCY
    7.
    发明申请
    HIGH VOLTAGE NANOSECOND PULSER WITH VARIABLE PULSE WIDTH AND PULSE REPETITION FREQUENCY 审中-公开
    具有可变脉冲宽度和脉冲重复频率的高电压纳米脉冲脉冲

    公开(公告)号:WO2016007960A1

    公开(公告)日:2016-01-14

    申请号:PCT/US2015/040204

    申请日:2015-07-13

    CPC classification number: H03K3/57 H01F27/306 H01F38/30

    Abstract: A nanosecond pulser is disclosed. In some embodiments, the nanosecond pulser may include one or more switch circuits including one or more solid state switches, a transformer, and an output. In some embodiments, the transformer may include a first transformer core, a first primary winding wound at least partially around a portion of the first transformer core, and a secondary winding wound at least partially around a portion of the first transformer core. In some embodiments, each of the one or more switch circuits are coupled with at least a portion of the first primary winding. In some embodiments, the output may be electrically coupled with the secondary winding and outputs electrical pulses having a peak voltage greater than about 1 kilo volt and a rise time of less than 150 nanoseconds or 50 nanoseconds.

    Abstract translation: 公开了纳秒脉冲发生器。 在一些实施例中,纳秒脉冲发生器可以包括一个或多个开关电路,包括一个或多个固态开关,变压器和输出。 在一些实施例中,变压器可以包括第一变压器铁芯,至少部分绕第一变压器铁芯的一部分缠绕的第一初级绕组,以及至少部分绕第一变压器铁芯的一部分缠绕的次级绕组。 在一些实施例中,一个或多个开关电路中的每一个与第一初级绕组的至少一部分耦合。 在一些实施例中,输出可以与次级绕组电耦合,并输出具有大于约1千伏的峰值电压和小于150纳秒或50纳秒的上升时间的电脉冲。

    EFFICIENT ENERGY RECOVERY IN A NANOSECOND PULSER CIRCUIT

    公开(公告)号:WO2020146436A9

    公开(公告)日:2020-07-16

    申请号:PCT/US2020/012641

    申请日:2020-01-08

    Abstract: Some embodiments include a nanosecond pulser circuit. In some embodiments, a nanosecond pulser circuit may include: a high voltage power supply; a nanosecond pulser electrically coupled with the high voltage power supply and switches voltage from the high voltage power supply at high frequencies; a transformer having a primary side and a secondary side, the nanosecond pulser electrically coupled with the primary side of the transformer; and an energy recovery circuit electrically coupled with the secondary side of the transformer. In some embodiments, the energy recovery circuit comprises: an inductor electrically coupled with the high voltage power supply; a crowbar diode arranged in parallel with the secondary side of the transformer; and a second diode disposed in series with the inductor and arranged to conduct current from a load to the high voltage power supply.

    PLASMA SHEATH CONTROL FOR RF PLASMA REACTORS

    公开(公告)号:WO2020033931A1

    公开(公告)日:2020-02-13

    申请号:PCT/US2019/046067

    申请日:2019-08-09

    Abstract: Some embodiments include a plasma sheath control system that includes an RF power supply producing an A sinusoidal waveform with a frequency greater than 20 kHz and a peak voltage greater than 1 kV and a plasma chamber electrically coupled with the RF power supply, the plasma chamber having a plurality of ions that are accelerated into a surface disposed with energies greater than about 1 kV, and the plasma chamber produces a plasma sheath within the plasma chamber from the sinusoidal waveform. The plasma sheath control system includes a blocking diode electrically connected between the RF power supply and the plasma chamber and a capacitive discharge circuit electrically coupled with the RF power supply, the plasma chamber, and the blocking diode; the capacitive discharge circuit discharges capacitive charges within the plasma chamber with a peak voltage greater than 1 kV and a discharge time that less than 250 nanoseconds.

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