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公开(公告)号：WO2023043936A1
公开(公告)日：2023-03-23
申请号：PCT/US2022/043680
申请日：2022-09-15
Applicant: ENTEGRIS, INC.
Inventor： STURM, Ed A. , DESPRES, Joe R.
Abstract: Described are methods, systems, and apparatus for processing a gas mixture that contains at least two gases by contacting the gas mixture with a membrane that allows for preferential flow of one of the gases through the membrane, to separate one constituent gas from the mixture.
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