公开(公告)号：WO2022204181A1

公开(公告)日：2022-09-29

申请号：PCT/US2022/021385

申请日：2022-03-22

Applicant: LAM RESEARCH CORPORATION

Inventor： ANTOLIK, Jerrel Kent ,  TORBATISARRAF, Seyedalireza

IPC: H01J37/32

Abstract: A component constructed by an additive manufacturing process includes an assembly body formed during the additive manufacturing process using a first type of powdered material. Hie component further includes a plurality of thermal management channels within the assembly body, lire plurality of thermal management channels may be constructed during the additive manufacturing process using a. second type of powdered material, the plurality of thermal management channels forming a thermal element.

公开(公告)号：WO2020142150A1

公开(公告)日：2020-07-09

申请号：PCT/US2019/063795

申请日：2019-11-27

Applicant: LAM RESEARCH CORPORATION

Inventor： ANTOLIK, Jerrel Kent

IPC: H01L21/67

Abstract: A process module including a chamber body having a lower chamber and an upper chamber is provided. The lower chamber is configured to mate with the upper chamber along a diagonal interface. An electrode assembly having a substrate support is provided. The electrode assembly is coupled to the upper chamber. A hinge connect couples a first side of the lower chamber to a first side of the upper chamber. The upper chamber is configured to split and open along the diagonal interface and rotate about the hinge connect. The electrode assembly is configured to rotate with the upper chamber in a direction that is away from the lower chamber.