METHOD AND SYSTEM FOR CONTROL OF A MATERIAL REMOVAL PROCESS USING SPECTRAL EMISSION DISCRIMINATION
    2.
    发明申请
    METHOD AND SYSTEM FOR CONTROL OF A MATERIAL REMOVAL PROCESS USING SPECTRAL EMISSION DISCRIMINATION 审中-公开
    使用光谱排放歧视来控制材料去除过程的方法和系统

    公开(公告)号:WO1993012906A1

    公开(公告)日:1993-07-08

    申请号:PCT/US1992010936

    申请日:1992-12-17

    Abstract: A method for removing material from a structure, comprising the steps of: (1) generating a light beam; (2) irradiating the surface material of a structure with the light beam having an intensity sufficient to ablate the surface material and to cause the surface material to generate spectral emission signals having intensities; (3) scanning the structure with the light beam at a scan speed; (4) monitoring the spectral emissions to detect a selected one of the spectral emission signals having a selected wavelength and generating an electronic output signal representative of the intensity of a selected one of the spectral emission signals in response to detecting the selected one of the spectral emission signals; (5) determining an updated scan speed functionally related to the electronic output signal; and (6) directing the scan speed to be equal to the updated scan speed. A second embodiment determines the updated scan speed based on the intensity of spectral emission signals detected during predetermined intervals while the structure is illuminated by the light source. A third embodiment determines an updated scan speed based on the intensity of spectral emission signals resulting from a laser pulse irradiating the structure when the output of the light beam is approximately at a minimum.

    PHOTOACOUSTIC CONTROL OF A PULSED LIGHT MATERIAL REMOVAL PROCESS
    3.
    发明申请
    PHOTOACOUSTIC CONTROL OF A PULSED LIGHT MATERIAL REMOVAL PROCESS 审中-公开
    脉冲光材料去除过程的光电控制

    公开(公告)号:WO1993012907A1

    公开(公告)日:1993-07-08

    申请号:PCT/US1992010894

    申请日:1992-12-16

    CPC classification number: G01N29/2418 G01N2291/0423

    Abstract: An automated system and method removes one or more layers (16, 18) of a material from a substrate (20). The substrate is irradiated with a light beam (12) having an intensity sufficient to ablate the materials in order to expose selected regions of the substrate. The ablated material generates photoacoustic signature signals (22). The structure is scanned with the light beam along a predetermined path at a scan speed; the photoacoustic signature signals are detected along the scan path, and an updated scan speed functionally related to the detected photoacoustic signals is determined. One embodiment of the invention exposes a selected layer of a multilayered structure in a process which includes irradiating the surface of multilayered structure by comparing representations of the photoacoustic pressure wave signals with a reference value corresponding to a photoacoustic signature signal of a layer of the structure selected to be exposed.

    METHOD FOR USING PULSED OPTICAL ENERGY TO INCREASE THE BONDABILITY OF A SURFACE
    4.
    发明申请
    METHOD FOR USING PULSED OPTICAL ENERGY TO INCREASE THE BONDABILITY OF A SURFACE 审中-公开
    使用脉冲光学能量来提高表面粘合性的方法

    公开(公告)号:WO1993023249A1

    公开(公告)日:1993-11-25

    申请号:PCT/US1993004737

    申请日:1993-05-18

    Abstract: A method and system for improving the capability of a surface (14) of an organic structure (16) to bond with another material includes irradiating a target area of the surface of a structure with pulsed, incoherent optical energy (18) from an optical energy source (12) having wavelength components which range from 170-5000 nanometers at an intensity sufficient to photodecompose any adventitious organic substances on the surface and to photodecompose a thin layer of molecular bonds forming the surface of the structure; and exposing the target area of the surface (14) to an ionized gas stream (24) from an ionized gas generator (26) that chemically reacts with the target area of the surface to increase the surface free energy of the surface. A similar method may also be employed to improve the bondability of a metal surface by impinging a target area on a metal surface with a stream of particles (36) to preclean and dislodge any inorganic substances from the surface; and then irradiating the target area of the surface with pulsed, incoherent optical energy (18) having wavelength components in the range of 170-5000 nanometers at an intensity sufficient to photodecompose any remaining organic substances present on the surface.

    Abstract translation: 用于提高有机结构(16)的表面(14)与另一种材料结合的能力的方法和系统包括用脉冲的非相干光能(18)从光能照射结构表面的目标区域 源(12)具有范围为170-5000纳米的波长分量,其强度足以光刻分解表面上的任何不定的有机物质并且光分解形成结构表面的薄层分子键; 以及从与所述表面的目标区域化学反应的电离气体发生器(26)将所述表面(14)的目标区域暴露于离子化气流(24)以增加所述表面的表面自由能。 也可以采用类似的方法来改善金属表面的粘合性,通过用颗粒物流(36)冲击金属表面上的目标区域,以从表面去除和去除任何无机物质; 然后用波长分量在170-5000纳米范围内的脉冲非相干光能(18)以表面上存在的任何剩余有机物质的强度照射表面的目标区域。

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