公开(公告)号：WO2023023133A1

公开(公告)日：2023-02-23

申请号：PCT/US2022/040566

申请日：2022-08-17

Applicant: META PLATFORMS TECHNOLOGIES, LLC

Inventor： OUDERKIRK, Andrew John ,  MULLEN, Emma Rae ,  ELABBASI, Nagi

IPC: F04B43/04 ,  H01L41/45 ,  F04B43/00 ,  H01L41/09 ,  H01L41/37

Abstract: A fluid pump includes a housing defining a fluid chamber and a piezoelectric membrane located within the chamber and attached to the housing. The piezoelectric membrane may divide the fluid chamber into a first fluid cavity and a second fluid cavity such that the application of an electric field to the piezoelectric membrane and its resulting displacement may provide a force that drives fluid through the pump, e.g., from an inlet of the fluid chamber into the first fluid cavity and from the second fluid cavity to an outlet of the fluid chamber.