公开(公告)号：WO2006127646A3

公开(公告)日：2009-04-16

申请号：PCT/US2006019817

申请日：2006-05-22

Applicant: MKS INSTR INC

Inventor： GEFTER PETER ,  GEHLKE SCOTT ,  IGNATENKO ALEXANDRE

IPC: B23K10/00 ,  B23K9/00 ,  B23K9/02 ,  H01T23/00 ,  H02H1/04

CPC classification number: H01T23/00

Abstract: Static neutralization of a charged object is provided by generating, in an ionizing cell or module, an ion cloud having a mix of positively and negatively charged ions, and reshaping the ion cloud by redistributing the ions into two regions of opposite polarity by using a second voltage. The second voltage creates an electrical field, which is preferably located in the vicinity of the ion cloud. The redistribution of the ions increases the effective range in which available ions may be displaced or directed towards the charged object. The electrical field redistributes ions that form the ion cloud. Ion redistribution within the ion cloud occurs because ions having a polarity corresponding to the polarity of the second voltage are repelled from the electrical field, and ions having a polarity opposite from that of the electrical field are attracted to electrical field. Redistribution of the ions into two regions of opposite polarity in the ion cloud in turn reshapes the ion cloud so that a portion of the cloud corresponding to the repelled ions is displaced by ions attracted to the electrical field, thus enhancing the range in which the ions may be dispersed or directed. This manner of redistributing ions into two regions is sometimes referred to as "ion polarization" in the disclosure herein.

Abstract translation: 通过在电离电池或模块中产生具有带正电荷和带负电荷的离子的混合物的离子云，并且通过使用第二个方法将离子重新分布到两个相反极性的区域来重新形成离子云来提供带电物体的静态中和 电压。 第二电压产生电场，其优选位于离子云附近。 离子的再分布增加了有效范围，其中可用的离子可以被置换或引向带电对象。 电场重新分布形成离子云的离子。 离子云中的离子重新分布是因为具有对应于第二电压的极性的极性的离子被从电场排斥，并且具有与电场相反的极性的离子被吸引到电场。 将离子重新分布到离子云中的相反极性的两个区域中，然后重新形成离子云，使得对应于排斥离子的一部分云被被吸引到电场的离子置换，从而增强离子的范围 可能分散或导向。 在本文的公开内容中，将离子重新分配到两个区域中的这种方式有时被称为“离子极化”。

公开(公告)号：WO2006127646A9

公开(公告)日：2007-01-25

申请号：PCT/US2006019817

申请日：2006-05-22

Applicant: MKS INSTR INC

Inventor： GEFTER PETER ,  GEHLKE SCOTT ,  IGNATENKO ALEXANDRE

IPC: H02H1/04 ,  B23K9/00 ,  B23K9/02 ,  H01T23/00

CPC classification number: H01T23/00

Abstract: Static neutralization of a charged object is provided by generating, in an ionizing cell or module, an ion cloud having a mix of positively and negatively charged ions, and reshaping the ion cloud by redistributing the ions into two regions of opposite polarity by using a second voltage. The second voltage creates an electrical field, which is preferably located in the vicinity of the ion cloud. The redistribution of the ions increases the effective range in which available ions may be displaced or directed towards the charged object. The electrical field redistributes ions that form the ion cloud. Ion redistribution within the ion cloud occurs because ions having a polarity corresponding to the polarity of the second voltage are repelled from the electrical field, and ions having a polarity opposite from that of the electrical field are attracted to electrical field. Redistribution of the ions into two regions of opposite polarity in the ion cloud in turn reshapes the ion cloud so that a portion of the cloud corresponding to the repelled ions is displaced by ions attracted to the electrical field, thus enhancing the range in which the ions may be dispersed or directed. This manner of redistributing ions into two regions is sometimes referred to as "ion polarization" in the disclosure herein.

Abstract translation: 通过在电离电池或模块中产生具有带正电荷和带负电荷的离子的混合物的离子云，并通过使用第二种方式将离子重新分配到两个相反极性的区域来重新形成离子云来提供带电物体的静态中和 电压。 第二电压产生电场，其优选位于离子云附近。 离子的再分布增加了有效范围，其中可用的离子可能被置换或引向带电对象。 电场重新分布形成离子云的离子。 离子云中的离子重新分布是因为具有与第二电压的极性对应的极性的离子从电场排斥，具有与电场相反的极性的离子被吸引到电场。 将离子重新分布到离子云中的相反极性的两个区域中，然后重新形成离子云，使得对应于排斥离子的一部分云被被吸引到电场的离子置换，从而增强了离子 可能分散或导向。 在本文的公开内容中，将离子重新分配到两个区域中的这种方式有时被称为“离子极化”。