公开(公告)号：WO2014052777A1

公开(公告)日：2014-04-03

申请号：PCT/US2013/062218

申请日：2013-09-27

Applicant: NORTH CAROLINA STATE UNIVERSITY

Inventor： DOW, Thomas A. ,  ZDANOWICZ, Erik ,  SOHN, Alexander ,  SCATTERGOOD, Ron ,  NOWAK, William John

IPC: B29C59/02 ,  B29C33/42

CPC classification number: B29C59/022 ,  B29C33/3878 ,  B29C33/424 ,  B29C2059/023 ,  B29K2995/0018 ,  B29K2995/0093 ,  B29L2011/00 ,  B29L2031/7562 ,  B81C99/0025 ,  B81C2201/0153 ,  B82Y40/00 ,  H01L31/02325

Abstract: The subject matter described herein relates to methods and systems for fast imprinting of nanometer scale features in a workpiece. According to one aspect, a system for producing nanometer scale features in a workpiece is disclosed. The system includes a die having a surface with at least one nanometer scale feature located thereon. A first actuator moves the die with respect to the workpiece such that the at least one nanometer scale feature impacts the workpiece and imprints a corresponding at least one nanometer scale feature in the workpiece.

Abstract translation: 本文所述的主题涉及用于在工件中快速压印纳米尺度特征的方法和系统。 根据一个方面，公开了一种用于在工件中制造纳米尺度特征的系统。 该系统包括具有位于其上的具有至少一个纳米级特征的表面的管芯。 第一致动器相对于工件移动模具，使得至少一个纳米尺度特征冲击工件并且在工件中压印相应的至少一个纳米尺度特征。