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公开(公告)号：WO2020145202A1
公开(公告)日：2020-07-16
申请号：PCT/JP2019/051458
申请日：2019-12-27
IPC分类号： G01C19/56
摘要： A sensing device includes an anchor having a central axis that defines a first radial direction and a second radial direction, and a resonant member flexibly supported by the anchor that includes a main body made of a single-crystal solid. The main body has a first material stiffness in the first radial direction and a second material stiffness in the second radial direction that is less than the first material stiffness. Moreover, the main body has a first component stiffness in the first radial direction and a second component stiffness in the second radial direction that is substantially similar to the first component stiffness. Another sensing device includes a resonant member having a main body that defines an aperture extending through the main body, and an electrode located in the aperture such that a capacitive channel is defined between the electrode and the main body that circumscribes the electrode.
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公开(公告)号：WO2020145203A1
公开(公告)日：2020-07-16
申请号：PCT/JP2019/051459
申请日：2019-12-27
IPC分类号： G01C19/567
摘要： A sensing device includes a resonant member that is movable in a first mode and a second mode, and an electrode. The resonant member has a capacitive surface portion that faces and is capacitively coupled to a capacitive surface portion of the electrode. Displacement for each point along the capacitive surface portion of the resonant member in the first mode is substantially tangent to the point.
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