公开(公告)号：WO2007127871A2

公开(公告)日：2007-11-08

申请号：PCT/US2007067549

申请日：2007-04-26

Applicant: SOKUDO CO LTD ,  LIN Y SEAN

Inventor： LIN Y SEAN

IPC: B05C11/00 ,  B05C5/00

CPC classification number: H01L21/6715 ,  H01L21/67253

Abstract: A device for detection of a semiconductor process liquid is provided. The device includes a light source adapted to generate a light beam and a digital optical sensor to detect the light beam. A nozzle is adapted to support the semiconductor process liquid and transmit the light beam. The nozzle and the source are arranged to refract the beam in a first direction while the beam passes through a gas disposed in the nozzle. The nozzle and source are arranged to refract the beam in a second direction while the beam passes through the liquid.

Abstract translation: 提供了一种用于检测半导体工艺液体的装置。 该装置包括适于产生光束的光源和用于检测光束的数字光学传感器。 喷嘴适于支撑半导体工艺液体并透射光束。 喷嘴和源被布置成当光束通过设置在喷嘴中的气体时沿第一方向折射光束。 喷嘴和源被设置成在光束通过液体时沿第二方向折射光束。