公开(公告)号：WO2016096377A1

公开(公告)日：2016-06-23

申请号：PCT/EP2015/077925

申请日：2015-11-27

申请人： TATA STEEL NEDERLAND TECHNOLOGY B.V.

发明人： BURTON, Daniel Brian ,  MAALMAN, Theodorus Franciscus Jozef ,  ZOESTBERGEN, Edzo ,  COMMANDEUR, Colin ,  BEENTJES, Petrus Cornelis Jozef

IPC分类号： C23C14/24

CPC分类号： C23C14/243 ,  B01D39/16 ,  B01D46/2403 ,  B01D46/4263 ,  B01D2239/0464 ,  C23C14/14

摘要： The invention relates to a filter device for reducing the amount of non-vaporous components in a vapour stream, comprising a carbon foam as filter material that is capable of being penetrated by the vapour stream and that is arranged in such a way that the only route for the vapour stream to pass the carbon foam is via penetration of the carbon foam. The device is in particular suitable for coating a substrate by physical vapour deposition of the vapour. The homogenous and single phase vapour stream produced by the filter device results in a smooth coated substrate wherein splashes are virtually absent.

摘要翻译： 本发明涉及一种用于减少蒸气流中非汽相组分量的过滤装置，其包括碳泡沫作为过滤材料，该碳泡沫能够被蒸气流渗透，并且以这样一种方式排列， 因为蒸气流通过碳泡沫是通过碳泡沫的渗透。 该装置特别适用于通过蒸汽的物理气相沉积来涂覆基板。 由过滤装置产生的均相和单相蒸汽流导致光滑的涂覆基质，其中飞溅物几乎不存在。