PRESSURE SENSORS WITH TENSIONED MEMBRANES
    1.
    发明申请
    PRESSURE SENSORS WITH TENSIONED MEMBRANES 审中-公开
    带张紧膜的压力传感器

    公开(公告)号:WO2017180670A2

    公开(公告)日:2017-10-19

    申请号:PCT/US2017/027074

    申请日:2017-04-11

    Abstract: Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

    Abstract translation: 公开了具有环张紧膜的压力传感器。 张紧环以这样的方式结合到膜上,该方式导致张紧环对膜施加张力,使膜变平并减少或消除在生产期间可能发生的缺陷。 膜在张紧环外部的点处与传感器壳体结合,防止将膜结合到壳体的过程将缺陷引入到膜的张紧部分中。 可以在电容式压力传感器中将电介质引入膜和反电极之间的间隙中,从而导致改善的动态范围。

    PRESSURE SENSORS WITH TENSIONED MEMBRANES
    2.
    发明申请

    公开(公告)号:WO2017180670A3

    公开(公告)日:2017-10-19

    申请号:PCT/US2017/027074

    申请日:2017-04-11

    Abstract: Pressure sensors having ring-tensioned membranes are disclosed. A tensioning ring is bonded to a membrane in a manner that results in the tensioning ring applying a tensile force to the membrane, flattening the membrane and reducing or eliminating defects that may have occurred during production. The membrane is bonded to the sensor housing at a point outside the tensioning ring, preventing the process of bonding the membrane to the housing from introducing defects into the tensioned portion of the membrane. A dielectric may be introduced into the gap between the membrane and the counter electrode in a capacitive pressure sensor, resulting in an improved dynamic range.

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