TWO-STAGE KINEMATIC MOUNT
    1.
    发明申请
    TWO-STAGE KINEMATIC MOUNT 审中-公开
    两级动力装置

    公开(公告)号:WO1998018157A1

    公开(公告)日:1998-04-30

    申请号:PCT/US1997018076

    申请日:1997-10-01

    CPC classification number: H01L21/68

    Abstract: This invention provides rapid, accurate and repeatable alignment of components in three spatial coordinate directions to within about +/-10 mu m. It comprises a two-stage kinematic mount and a corresponding two-stage mountable module, each having a macrostage for initial alignment and a microstage for further, high accuracy alignment. The microstage of the mount preferably has either three alignment pins or three constraints and the microstage of the mountable module likewise preferably has either three pins or three constraints, so that the constraints of one component receive the pins of the other. A compliant layer is positioned between the microstage and macrostage of the mountable module. This invention further includes two-stage mount and mountable modules incorporating optical, electrical, mechanical or fluidic elements. In a preferred embodiment, the microstage module has a V-groove fluid flow channel suitable for use in optical flow cytometry.

    Abstract translation: 本发明提供了在三个空间坐标方向上的组件的快速,准确和可重复的对准,在约+/-10μm内。 它包括两级运动安装座和相应的两级可安装模块,每个模块具有用于初始对准的宏观阶段和用于进一步高精度对准的微型台阶。 安装架的微型台阶优选地具有三个对准销或三个约束,并且可安装模块的微步骤同样优选地具有三个引脚或三个约束,使得一个部件的约束接收另一个部件的引脚。 柔性层位于可安装模块的微台阶和宏观阶段之间。 本发明还包括并入光学,电气,机械或流体元件的两级安装和安装模块。 在优选的实施方案中,微步骤模块具有适合用于光流式细胞术的V沟流体流动通道。

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