公开(公告)号：WO0248746A2

公开(公告)日：2002-06-20

申请号：PCT/US0148482

申请日：2001-12-13

Applicant: TIMBRE TECH INC

Inventor： DODDI SRINIVAS ,  NICKHIL JAKATDAR ,  XINHUI NIU

IPC: G01M11/00 ,  G02B5/18 ,  G06F17/30 ,  G01W

CPC classification number: G02B5/18 ,  G03F7/70625 ,  Y10S706/934

Abstract: Invention teaches a method and system for characterizing grating profile data. One embodiment is a method for characterizing grating profile data by clustering the grating profile data space and associating profile space data to each cluster. Another aspect of the present invention is a system for classifying grating profile comprising a cluster generator for generating clusters of grating profiles, for associating profile shape data to each cluster, and for linking the associated profile shape data to the grating profiles belonging to each cluster. The present invention includes a method and a system for evaluating input grating profile by comparing the profile data from the closest matching grating profile by comparing data from the closest matching grating profile library instance with a set of acceptable ranges of profile data for the application; flagging the input grating profile if the profile data is outside the set of acceptable ranges; and presenting the profile data and flags associated with the input grating profile. The system is scalable and may operate in a distributed manner utilizing networks.

Abstract translation: 发明教导了用于表征光栅轮廓数据的方法和系统。 一个实施例是通过聚集光栅轮廓数据空间并将轮廓空间数据与每个簇相关联来表征光栅轮廓数据的方法。 本发明的另一方面是用于对光栅轮廓进行分类的系统，该系统包括用于产生光栅轮廓簇的簇发生器，用于将轮廓形状数据与每个簇相关联，以及将相关轮廓形状数据链接到属于每个簇的光栅轮廓。 本发明包括一种方法和系统，用于通过比较来自最接近的匹配光栅轮廓的轮廓数据来比较来自最接近的匹配光栅轮廓库实例的数据与应用的轮廓数据的可接受范围的集合来评估输入光栅轮廓; 如果轮廓数据在可接受的范围之外，则标记输入光栅轮廓; 并呈现与输入光栅轮廓相关联的轮廓数据和标记。 该系统是可扩展的，并且可以利用网络以分布式方式运行。