公开(公告)号：WO2021148632A1

公开(公告)日：2021-07-29

申请号：PCT/EP2021/051497

申请日：2021-01-22

Applicant: TECHNISCHE UNIVERSITEIT DELFT

Inventor： VERBIEST, Gerard Jan

IPC: G01N29/04 ,  G01N21/17 ,  G01N29/06 ,  G01N29/07 ,  G01N29/24 ,  G01S15/89 ,  G01Q60/32 ,  G01N2021/1706 ,  G01N21/1702 ,  G01N2291/011 ,  G01N2291/023 ,  G01N2291/0422 ,  G01N2291/044 ,  G01N2291/101 ,  G01N29/043 ,  G01N29/0681 ,  G01N29/2418 ,  G01S15/8911 ,  G01S15/8968 ,  G01S7/52036 ,  G01S7/52079 ,  G01S7/52085

Abstract: The invention relates to an ultrasonic subsurface imaging microscopy device, and a method of using such a device. The device comprises a probe, a laser beam source and a detector. The probe comprises a tip arranged at a first surface of the probe, and an illumination area arranged at a second surface of the probe. The laser beam source is configured for generating short pulses of laser light, and for directing said short pulses of laser light onto the illumination area of the probe for generating acoustic pulses in the probe. The probe is configured to guide said acoustic pulses towards an end of the tip which faces away from said probe. The detector is configured for time-resolved detection of acoustic vibrations in said tip and/or said probe in between subsequent acoustic pulses, in particular acoustic vibration from reflections of said generated acoustic pulses from subsurface structures in a sample.