公开(公告)号：WO2022256466A1

公开(公告)日：2022-12-08

申请号：PCT/US2022/031859

申请日：2022-06-02

Applicant: KLA CORPORATION

Inventor： LIU, Helen ,  ZHANG, GuoQing ,  LI, Hui

IPC: G01B9/02 ,  G01B9/02002 ,  G01B9/02001 ,  G01B9/02055 ,  G01B11/06 ,  G01B11/24 ,  H01L21/66

Abstract: Systems and methods for unwrapping a phase map are disclosed. Such systems and methods may include receiving a wrapped phase map associated with an interferometric measurement of a sample including patterned features; removing a tilt from the wrapped phase map; generating a background; detecting features in the wrapped phase, the features in the wrapped phase map corresponding to least some of the patterned features of the sample; replacing phases of the features with the background at corresponding locations in the wrapped phase map; unwrapping the modified wrapped phase map using a global phase-unwrapping; applying local phase-unwrapping to restore the phases of the features; and reapplying the tilt to generate an output unwrapped phase map.

公开(公告)号：WO2022191921A1

公开(公告)日：2022-09-15

申请号：PCT/US2022/012632

申请日：2022-01-15

Applicant: HRL LABORATORIES, LLC

Inventor： AUTRY, Travis ,  COUNTS, Ian ,  ELLIS, Jennifer ,  KIM, Danny ,  ROPER, Christopher

IPC: G01B9/02001 ,  G01B9/02002 ,  G01B9/02

Abstract: In some variations, an interferometric frequency-reference apparatus comprises: an atom source configured to supply neutral atoms to be ionized; an ionizer configured to excite the neutral atoms to form ionized atoms; an ion collimator configured to form a collimated beam of the ionized atoms; probe lasers; and a Doppler laser configured to determine a ground-state population of the ionized atoms, wherein the atom source, the ionizer, and the ion collimator are disposed within a vacuum chamber. Other variations provide a method of creating a stable frequency reference, comprising: forming ionized atoms from an atomic vapor; forming a collimated beam of ionized atoms; illuminating ionized atoms with first and second probe lasers; adjusting the frequencies of the first probe and second probe lasers using Ramsey spectroscopy to an S → D transition of ionized atoms; and determining a ground-state population of the ionized atoms with another laser.

公开(公告)号：WO2022162224A1

公开(公告)日：2022-08-04

申请号：PCT/EP2022/052220

申请日：2022-01-31

Applicant: CARL ZEISS MEDITEC, INC. ,  CARL ZEISS MEDITEC AG

Inventor： EVERETT, Matt ,  SCHMOLL, Tilman

IPC: G01B9/02001 ,  A61B3/10 ,  A61B5/00 ,  G01B9/02 ,  G01B9/0209 ,  G01B9/02091

Abstract: An OCT system is constructed on a micro optical bench or semiconductor optical bench. The present OCT system may use free space optics and avoid the use of fiber optics.

公开(公告)号：WO2021252272A1

公开(公告)日：2021-12-16

申请号：PCT/US2021/035813

申请日：2021-06-04

Applicant: KLA CORPORATION

Inventor： VOLKOVICH, Roie ,  BACHAR, Ohad ,  GUTMAN, Nadav

IPC: G01B11/25 ,  G03F7/20 ,  G01B11/272 ,  G01B2210/56 ,  G01B9/02001 ,  G01M11/0207 ,  G03F7/70 ,  G03F7/70125 ,  G03F7/70483 ,  G03F7/70633 ,  G03F7/70691 ,  G03F7/70775

Abstract: A metrology system is disclosed, in accordance with one or more embodiments of the present disclosure. The metrology system includes a stage configured to secure a sample, one or more diffraction-based overlay (DBO) metrology targets disposed on the sample. The metrology system includes a light source and one or more sensors. The metrology system includes a set of optics configured to direct illumination light from the light source to the one or more DBO metrology targets of the sample, the set of optics including a half-wave plate, the half-wave plate selectively insertable into an optical path such that the half-wave plate selectively passes both illumination light from an illumination channel and collection light from a collection channel, the half-wave plate being configured to selectively align an orientation of linearly polarized illumination light from the light source to an orientation of a grating of the one or more DBO metrology targets.

公开(公告)号：WO2023073385A1

公开(公告)日：2023-05-04

申请号：PCT/GB2022/052755

申请日：2022-11-01

Applicant: USW COMMERCIAL SERVICES LTD ,  NPL MANAGEMENT LIMITED

Inventor： COPNER, Nigel Joseph ,  COPNER, Bethan Rose ,  HUGHES, Edward Benjamin ,  CAMPBELL, Michael Aloysius ,  LI, Kang ,  QIAO, Dun

IPC: G01B9/02004 ,  G01B9/02001 ,  G01B9/02

Abstract: An interferometer is described comprising: a continuous-wave beam generator for generating a first beam and a second beam, each having a respective frequency which varies with time. The interferometer is arranged such that, in use, the first beam is transmitted along a target path having a length to be measured and the second beam is transmitted along a reference path having a reference length. The interferometer also comprises a sum-frequency generator for receiving the first beam and the second beam following their respective transmissions along the target path and the reference path and for generating a sum-frequency beam from the first beam and the second beam, the sum-frequency beam having a frequency which is a sum of the respective frequencies of the first beam and the second beam; and an analyser for analysing the sum-frequency beam to determine the length of the target path. An interferometry method is also described.

公开(公告)号：WO2023281270A1

公开(公告)日：2023-01-12

申请号：PCT/GB2022/051759

申请日：2022-07-08

Applicant: OXFORD UNIVERSITY INNOVATION LIMITED

Inventor： REICHOLD, Armin ,  QIU, Peter ,  ZHAO, Songyuan ,  BRUCKE, Edgar

IPC: G01B9/02003 ,  G01B9/02001 ,  G01B9/02056 ,  G01B9/02055 ,  G01B9/02 ,  G01S17/34 ,  G01S17/36

Abstract: An interferometric displacement measurement apparatus (100) includes at least one measurement interferometer (103) for measuring a change in optical path difference between a measurement beam (150) and a reference beam. A light source module (118) is arranged to generate a modulated light beam, having a particular optical spectrum, from which the measurement beam and reference beam are derived. A data acquisition and analysis module (105) can determine a measure representative of the displacement using interference intensity data received from a photodetector (111) which detects the interference of the measurement beam with the reference beam.

公开(公告)号：WO2023047263A1

公开(公告)日：2023-03-30

申请号：PCT/IB2022/058835

申请日：2022-09-19

Applicant: NATIONAL RESEARCH COUNCIL OF CANADA

Inventor： CARLSON, Brent ,  HERRIOT, Glen

IPC: G01B9/02055 ,  G01B9/02001 ,  H04J14/02

Abstract: A system and method are provided for optical beamforming and interferometry using digital source modulation. In one aspect, a digitally-modulated calibration signal is included in the optical target source, for use by receiving mirrors and equipment to continuously lock onto, track, and remove atmospheric and instrumental temporal distortion effects. By using this digitally-modulated calibration signal throughout the optical signal chain any variations that both it and the science/payload signal undergo can be removed, leading to lower cost optical mirrors and optical interferometers, as well as allowing for larger optical apertures

公开(公告)号：WO2022225897A1

公开(公告)日：2022-10-27

申请号：PCT/US2022/025303

申请日：2022-04-19

Applicant: NIKON CORPORATION ,  GOODWIN, Eric Peter

Inventor： GOLDSTEIN, Goldie Lynne

IPC: G01B9/02001 ,  G01B9/02 ,  G01B9/02097 ,  G01B11/24

Abstract: The problem of measuring height properties (for instance, for aspheric optical components) is addressed by systems and methods that employ heterodyne optical interferometry to detect a plurality of interference patterns corresponding to a plurality of orientations of the surface and that determine a height property (such as a mid-spatial frequency spectrum or topography) of the surface from the plurality of interference patterns.

公开(公告)号：WO2022084150A1

公开(公告)日：2022-04-28

申请号：PCT/EP2021/078490

申请日：2021-10-14

Applicant: CARL ZEISS SMT GMBH

Inventor： MUENZ, Holger ,  PESCHKA, Martin ,  WALD, Matthias

IPC: G01B11/14 ,  G03F7/20 ,  G01B9/02001 ,  G01B11/02

Abstract: The invention relates to an apparatus (1) for determining a distance, comprising an optical resonator (2), which has a plurality of resonant frequencies (3), and at least one radiation source (4), the spectrum of which comprises at least one target resonant frequency (5) of the optical resonator (2). According to the invention, provision is made for an isolation device (6) to be provided in the beam path of the optical resonator (2), said isolation device isolating the target resonant frequency (5) on the basis of its polarization from other resonant frequencies (3) of the optical resonator (2).

公开(公告)号：WO2022152479A1

公开(公告)日：2022-07-21

申请号：PCT/EP2021/085336

申请日：2021-12-12

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSEN, Maarten, Jozef

IPC: G01B9/02001 ,  G01B9/02055 ,  G01B9/02003 ,  G03F7/20

Abstract: The invention provides an interferometer system comprising: - a light source configured to emit a first light beam and a second light beam; - an optics system configured to allow the first light beam to travel along a measurement path including a target, and the second light beam to travel along a fixed reference path excluding the target; and - a signal generator configured to introduce a power-modulated optical signal in the measurement path or the reference path to determine jitter caused by components of the interferometer system downstream of the signal generator.