公开(公告)号：WO2021228959A1

公开(公告)日：2021-11-18

申请号：PCT/EP2021/062655

申请日：2021-05-12

Applicant: CARL ZEISS INDUSTRIELLE MESSTECHNIK GMBH

Inventor： BUBLITZ, Daniel ,  WESTPHAL, Peter

IPC: G01B9/02 ,  G01B2290/60 ,  G01B9/02003 ,  G01B9/02005 ,  G01B9/02007 ,  G01B9/02047

Abstract: Ein Verfahren zur Messung der Oberflächentopographie eines Objekts (18) weist folgende Schritte auf: a) Bereitstellen von Quellstrahlung und Aufteilen der Quellstrahlung in Beleuchtungsstrahlung (12) und Referenzstrahlung (22), b) Beleuchten der Oberfläche des Objekts (18) mit Beleuchtungsstrahlung (12) in einem flächig ausgedehnten Beleuchtungsfeld, wobei die Oberfläche das Objekt (18) gleichzeitig mit mehr als einer räumlichen Strahlungsmode beleuchtot wird und die Strahlungsmoden der Beleuchtung räumlich und zeitlich kohärent sind, aber zueinander einen festen Phasenunterschied haben, und c) Überlagern von an der Oberfläche des Objekts (18) rückgestreuter Beleuchtungsstrahlung mit der Referenzstrahlung (22) und Detektion eines Interferenzsignals der überlagerten Strahlungen (16, 22) mit mindestens einem Detektor (17). Die Schritte a) bis c) werden für mindestens zwei verschiedene, feste Wellenlängen durchgeführt. Mittels digitaler Holographie wird die Oberflächentopographie des Objekts (18) ermittelt.

公开(公告)号：WO2022192247A1

公开(公告)日：2022-09-15

申请号：PCT/US2022/019330

申请日：2022-03-08

Applicant: ONPOINT TECHNOLOGIES, LLC

Inventor： MASTERSON, Bernard P. ,  SAPPEY, Andrew D.

IPC: G01B9/02003 ,  G01J3/06 ,  G01J3/45 ,  G01N21/17 ,  G01N21/3504

Abstract: A gas leak detector includes a solar detector and a signal filter. The solar detector generates an electrical response by interfering a light signal with a solar signal and detecting a resultant interference signal. The signal filter is communicatively coupled to the solar detector and filters the electrical response to isolate a beat-note signal. The beat-note signal has an amplitude that is inversely related to a concentration of a species that forms a gaseous plume located along a path of the solar signal.

公开(公告)号：WO2023281270A1

公开(公告)日：2023-01-12

申请号：PCT/GB2022/051759

申请日：2022-07-08

Applicant: OXFORD UNIVERSITY INNOVATION LIMITED

Inventor： REICHOLD, Armin ,  QIU, Peter ,  ZHAO, Songyuan ,  BRUCKE, Edgar

IPC: G01B9/02003 ,  G01B9/02001 ,  G01B9/02056 ,  G01B9/02055 ,  G01B9/02 ,  G01S17/34 ,  G01S17/36

Abstract: An interferometric displacement measurement apparatus (100) includes at least one measurement interferometer (103) for measuring a change in optical path difference between a measurement beam (150) and a reference beam. A light source module (118) is arranged to generate a modulated light beam, having a particular optical spectrum, from which the measurement beam and reference beam are derived. A data acquisition and analysis module (105) can determine a measure representative of the displacement using interference intensity data received from a photodetector (111) which detects the interference of the measurement beam with the reference beam.

公开(公告)号：WO2022152479A1

公开(公告)日：2022-07-21

申请号：PCT/EP2021/085336

申请日：2021-12-12

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSEN, Maarten, Jozef

IPC: G01B9/02001 ,  G01B9/02055 ,  G01B9/02003 ,  G03F7/20

Abstract: The invention provides an interferometer system comprising: - a light source configured to emit a first light beam and a second light beam; - an optics system configured to allow the first light beam to travel along a measurement path including a target, and the second light beam to travel along a fixed reference path excluding the target; and - a signal generator configured to introduce a power-modulated optical signal in the measurement path or the reference path to determine jitter caused by components of the interferometer system downstream of the signal generator.

公开(公告)号：WO2022099200A1

公开(公告)日：2022-05-12

申请号：PCT/US2021/058643

申请日：2021-11-09

Applicant: GOVERNMENT OF THE UNITED STATES OF AMERICA, AS REPRESENTED BY THE SECRETARY OF COMMERCE

Inventor： LONG, David Alexander ,  GORMAN, Jason John ,  LEBRUN, Thomas Warren ,  RESCHOVSKY, Benjamin James

IPC: G01J3/453 ,  G01J3/457 ,  G01J3/10 ,  G01J3/12 ,  G01J3/433 ,  G01H9/00 ,  G01B9/02003 ,  G01B9/02001 ,  G01D5/353 ,  G01J3/45

Abstract: An optical sensor readout Interrogates an optical sensor and includes: a microcavity sensor that receives an optical frequency comb, produces a post-sensor optical frequency comb from the optical frequency comb based on a physical perturbation subjected to the microcavity sensor, and communicates the post-sensor optical frequency comb to a photo detector; an electro optic modulator in optical communication with the microcavity sensor and that receives input light and a radiofrequency drive signal, produces the optical frequency comb from the input light based on the radiofrequency drive signal, and communicates the optical frequency comb to the microcavity sensor; and the photo detector in optical communication with the microcavity sensor and that: receives the post-sensor optical frequency comb from the microcavity sensor; receives frequency shifted light; and produces a radiofrequency interferogram from interference between the post-sensor optical frequency comb and the frequency shifted light.

公开(公告)号：WO2022002497A1

公开(公告)日：2022-01-06

申请号：PCT/EP2021/064239

申请日：2021-05-27

Applicant: ASML NETHERLANDS B.V.

Inventor： JANSEN, Maarten, Jozef ,  IKKINK, Teunis, Jan

IPC: G01B9/02 ,  G03F7/20 ,  G03F9/00 ,  G01B9/02003 ,  G01B9/02007 ,  G01B9/02083 ,  G03F7/70775 ,  G03F9/7049

Abstract: The invention provides a a method to determine one or more signal parameters of each signal of interest in a plurality of signals of interest received at a single detector of a heterodyne interferometer, said method comprising the following steps: a. for each signal or interest, calculating a cleaned-up signal by estimating signal contributions of the other signals of interest and subtracting these estimated signal contributions from the plurality of signals of interest; and b. for each signal of interest, determining one or more signal parameters from the respective cleaned-up signal.