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发明公开
CN101048861A 基于升降机的工具装载和缓冲系统 失效 - 权利终止 转让

基于升降机的工具装载和缓冲系统
摘要：
提供了基片处理装备。该装备具有壳体、下部口接口和运载器保持站。壳体在其内部具有用于处理基片的处理设备。装载口接口连接到壳体以将基片装载到处理设备内。运载器保持站连接到壳体。运载器保持站适用于在装载口接口处保持至少一个基片传送运载器。运载器保持站设置为提供用于从运载器保持站替换基片传送运载器的快速交换区段。
摘要（英）：

A substrate processing apparatus (10) is provided. The apparatus has a casing, a load port interface (I) and a carrier holding station (16) The casing has processing devices (12) within for processing substrates. The load port interface (I) is connected to the casing for loading substrates into the processing device (12). The carrier holding station (16) is connected to the casing. The carrier holding statio (16) is adapted for holding at least one substrate transport carrier (C) at the load port interface (I). The carrier holding station (16) is arranged to provide a fast swap section for replacement of the substrate transport carrier (C) from the carrier holding station (16).

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