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发明授权
CN101115860B 真空部件的制造方法、树脂被膜形成装置及真空成膜系统 失效 - 权利终止

真空部件的制造方法、树脂被膜形成装置及真空成膜系统
摘要：
本发明提供一种对形状复杂的内部通路可容易地形成树脂被膜的真空部件制造方法及树脂被膜形成装置。本发明涉及的树脂被膜形成装置(21)，具有：单体蒸汽的供给部(23)、输送单体蒸汽的真空排气管线(24)、与真空排气管线(24)的一部分上设置的真空部件(22A)的内部通路可连接的连接部(24C)、在与该连接部(24C)连接的真空部件(22A)的内部通路上使上述单体蒸汽附着、形成树脂被膜的部件温度调节机构(31)。通过该构成，仅通过将真空部件(22A)的内部通路暴露于单体蒸汽中，就可在该内部通路上以均匀而且高的被覆性形成树脂被膜。
摘要（英）：

A production method for a vacuum component and a resin coating forming device capable of easily forming resin coating on an internal flow path complicated in shape. The resin coating forming device (21) comprises a monomer vapor supplying unit (23), a vacuum exhaust line (24) for transporting monomer vapor, a connection unit (24c) connectable with the internal flow path of a vacuum component (22A) provided on part of a vacuum exhaust line (24), and a component temperature regulating mechanism (31) for depositing the monomer vapor onto the internal flow path of the vacuum component (22A) connected with this connection unit (24c) to form resin coating. The above arrangement permits the formation of a uniform, high-coverage resin coating on the internal flow path of the vacuum component (22A) by merely exposing the internal flow path to monomer vapor.

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