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发明授权
CN101118903B 电容器及制造电容器的方法、半导体装置和液晶显示装置 失效 - 权利终止

电容器及制造电容器的方法、半导体装置和液晶显示装置
摘要：
本发明公开了一种电容器及制造电容器的方法、半导体装置和液晶显示装置。该电容器包括被顺序地堆叠的第一电极、介电层和第二电极。该介电层具有包括预定数目的铪氧化物亚层和预定数目的钽氧化物亚层的堆叠层结构。亚层的数目、材料和厚度被确定以使得厚度比率有一范围，在该范围内，在显示施加在第一电极和第二电极之间的电压和漏电流之间的关系的电压-漏电流特性中，当堆叠层结构中预定数目的钽氧化物亚层的总厚度与介电层的总厚度的比率变化时，开始电压满足3[MV/cm]或更高的电场强度的条件，以及预定数目的钽氧化物亚层的总厚度与介电层的总厚度的比率在一个厚度比率范围以使得开始电压在所述范围内。
摘要（英）：

A capacitor includes a first electrode, a dielectric layer, and a second electrode that are sequentially stacked. The dielectric layer has a stacked layer structure including a predetermined number of hafnium oxide sublayers and predetermined number of tantalum oxide sublayers. The number, materials, and thicknesses of the sublayers are determined so that the thickness ratio has a range in which,in voltage-leakage current characteristics showing the relationship between the voltage between the first and second electrodes and the leakage current, a start voltage at which the slope of an increase in the current starts to discontinuously increase satisfies an electric field strength of 3 [MV/cm] or more when the ratio of the total thickness of the predetermined number of tantalum oxide sublayers to the total thickness of the dielectric layer is varied, and the thickness ratio is within the range such that the start voltage is within the range.

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