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发明公开
CN101638771A 含贵金属的金属基陶瓷复合靶材的制造方法 无效 - 驳回

含贵金属的金属基陶瓷复合靶材的制造方法
摘要：
本发明的含贵金属的金属基陶瓷复合靶材的制造方法，其先利用湿式混粉过程，将陶瓷粉体均匀地披覆于磁性金属粉体的表面，并经由干燥过程后，取得陶金复合粉体，再利用干式混粉过程将贵金属粉体与所述陶金粉体均匀混合，最后利用成型和致密化过程将所述陶金复合粉体制成致密的靶材。本发明的制造方法可均匀地混合所述磁性金属粉体、所述陶瓷粉体和所述贵金属粉体，并且可减少靶材制作过程中所述贵金属粉体的浪费，故可改善靶材的质量和降低靶材的制造成本。
摘要（英）：

The invention relates to a metal-base ceramic composite target material containing noble metals and a manufacturing method thereof. The manufacturing method comprises the following steps: firstly, using a wet-type powder mixing process to evenly spread ceramic powder on the surface of magnetic metal powder, and obtaining ceramic-metal composite powder after a drying process; secondly, using a dry-type powder mixing process to evenly mixing noble metal powder with the ceramic-metal powder; and finally, using forming and compacting processes to make the ceramic-metal composite powder into a compact target material. The manufacturing method can evenly mix the magnetic metal powder, the ceramic powder and the noble metal powder and can reduce the waste of the noble metal powder in the manufacturing process of the target material, so the quality of the target material can be improved and the manufacturing cost of the target material can be reduced.

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