The invention discloses physical vapor deposition equipment for use in study on the light trapping structure of a silicon thin-film battery, which can perform large-area film coating on a sample and improve film coating efficiency so as to meet experimental requirements of large-area industrialization. In addition, the equipment can also control the concrete growing process of a thin film, carry out simple, reliable and stable operation, obviously improve the performance of the silicon thin-film solar battery and has a great production and practice significance.