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发明公开
CN101937834A 供气单元及供气装置 无效 - 撤回

供气单元及供气装置
摘要：
本发明提供一种能够使载气(吹扫气体)顺利通过且能够缩小设置有多个开闭阀的块的宽度的供气单元。在供气单元中，阀室(24)沿流路块(20)的长度方向以预定的间隔设于流路块(20)的顶面(20a)，连接流路(26)与阀室(24)的大致中央连接并向背离顶面(20a)的方向延伸。载气流路(21)形成为比连接流路(26)粗，且沿流路块(20)的长度方向直线状延伸，并且设置于偏离虚拟平面F的部分处，其中，虚拟平面在宽度方向上将流路块(20)二等分。处理气体流路(22)在与顶面(20a)相反侧的底面(20b)开口，且在流路块(20)中通过从虚拟平面F偏向与载气流路(21)相反一侧的部分后与阀室(24)连接。
摘要（英）：

The present invention provides a gas supply unit capable of feeding a supporting gas (sweeping gas) successfully and shortening the width of a block with a plurality of on-off valves. In the gas supply unit, a valve chamber (24) is arranged on a top face (20a) of a flow path block (20) by a prescribed interval along the length direction of the flow path block (20), a connection flow path (26) is basically connected with the center of the valve chamber (24) and is extended in a direction of being far from the top face (20a). a supporting gas flow path (21) is more coarse than the connection flow path (26) and is extended in a straight line along the length direction of the flow path block (20) and arranged on a portion far from a virtual plane F, wherein the flow path block (20) is bisected by the virtual plane in the width direction. A gas-processing flow path (22) is open on a bottom face (20b) arranged on an opposite side of the top face (20a), and is connected with the valve chamber (24) by a part partial to an opposite side of the supporting gas flow path (21) from the virtual plane in the flow path block (20).

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