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发明公开
CN101960557A 常温接合装置 有权 转让

常温接合装置
摘要：
本发明提供一种常温接合装置，其具备：角度调节机构，将保持第一基板的第一试料台支承在第一架台上并可变更所述第一试料台的朝向；第一驱动装置，沿第一方向驱动所述第一架台；第二驱动装置，沿第二方向驱动保持第二基板的第二试料台；以及滑架支承台，在压接所述第二基板和所述第一基板时，沿所述第一方向支承所述第二试料台。此时，常温接合装置可将超过第二驱动装置的耐负荷的大负荷施加于第一基板和第二基板。常温接合装置还能够利用角度调节机构变更第一基板的方向以使第一基板和第二基板平行地接触，能够使接合面均匀地承载所述大负荷。
摘要（英）：

A cold joining device has an angle adjusting mechanism for supporting a first sample base, which holds a first substrate, on a first stage so that the direction of the first sample base can be changed, a first driving device for driving in the first direction the first stage, a second driving device for driving in the second direction a second sample base for holding a second substrate, and a carriage support base for supporting the second sample base in the first direction when the second substrate is pressed against the first substrate. The cold joining device can apply a large load exceeding the load bearing capacity of the second driving device to the first substrate and the second substrate. Also, the cold joining device can change, by using the angle adjusting mechanism, the direction of the first substrate so that the first substrate and the second substrate are in parallel contact with each other, and thus the large load can be uniformly applied to the joined surfaces between the substrates.

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