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发明公开
CN102066872A 校准厚度测量装置的方法 失效 - 权利终止

校准厚度测量装置的方法
摘要：
本发明涉及一种用于校准厚度测量装置的方法，其中所述厚度测量装置在可以预先设定的测量方向(Z)上测量被测对象的厚度，所述厚度测量装置具有至少一个非接触式或者扫描式位移传感器(1，2)，其中将具有已知厚度和形状的参考对象(3)移动到所述至少一个位移传感器(1，2)的测量场的至少一个局部区域之中，所述方法能进行特别精确且简单的校准，该方法包括以下步骤：首先在可以预先设定的时刻tj或者根据所述参考对象(3)在所述测量场中的可以预先设定的位置Pj，由所述至少一个位移传感器(1，2)在所述参考对象(3)的第一表面上的至少两个可以预先设定的位置处记录至少两个独立的测量值，其中j＝1、2......；随后从在所述时刻tj或者根据所述参考对象(3)的位置Pj所记录的测量值确定所述参考对象(3)在所述测量场中的倾斜度或者空间位置；然后由所述至少一个位移传感器(1，2)在与所述第一表面相反的第二表面上或者在与所述第一表面相反的参考对象(3)表面区域上的位于所述测量方向(Z)上的另一个位置处记录另一个测量值，以便在所述测量方向(Z)上确定所述参考对象(3)的厚度值；接下来根据所述至少一个位移传感器(1，3)在所述时刻tj或者在所述测量方向(Z)上的位置Pj中的测量值来计算所述参考对象(3)的厚度值；最后对厚度计算值与所述参考对象(3)的已知厚度之差进行计算，以得到所述局部区域或者所述测量场中与位置和倾斜度或方位相关的修正值，从而能够在厚度测量过程中补偿所述至少一个位移传感器(1，2)在所述局部区域或者所述测量场中的几何误差和/或非线性度。
摘要（英）：

A method for calibrating a thickness gauge, wherein the thickness gauge measures the thickness of a measurement object in a predefinable measuring direction (Z), comprising at least one displacement sensor (1, 2) operating in a contactless or scanning manner, wherein a reference object (3) having a known thickness and shape is moved into at least a partial region of the measurement field of the at least one displacement sensor (1, 2), comprises the following steps with respect to particularly precise and simple calibration. First, at least two independent measurement values are recorded by the at least one displacement sensor (1, 2) in at least two predefinable sites on a first surface of the reference object (3) at predefinable times tj, or as a function of predefinable positions pj of the reference object (3) in the measurement field, where j = 1, 2... Then the tilting or spatial position of the reference object in the measurement field is determined based on the measurement values recorded at the times tj, or as a function of the positions pj of the reference object (3). Then, a further measurement value is recorded by the at least one displacement sensor (1, 2) at a further site located in the measuring direction (Z) on a second surface disposed opposite the first surface, or on a surface region of the reference object (3) disposed opposite the first surface, in order to determine a thickness value of the reference object (3) in the measuring direction (Z).

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