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CN102227817A 光电转换装置的制造方法、光电转换装置的制造装置及光电转换装置 失效 - 放弃专利权

光电转换装置的制造方法、光电转换装置的制造装置及光电转换装置
摘要：
提供一种能够将加工槽的槽深度控制成希望值的光电转换装置的制造方法、光电转换装置的制造装置及光电转换装置。一种光电转换装置(10)的制造方法，具有对构成光电转换装置(10)的中间接触层分离槽(15)照射皮秒激光，并使皮秒激光相对于中间接触层分离槽(15)进行相对移动而沿规定的扫描方向形成加工槽(15)的槽形成工序，其中，槽形成工序在与的射束直径相当的照射区域内形成沿一方向并列排列的干涉条纹，并以将干涉条纹沿扫描方向连接的方式使皮秒激光进行相对移动。
摘要（英）：

Provided are a photoelectric conversion device manufacturing method which can control the depth of a processing groove to a desired value, a photoelectric conversion device manufacturing apparatus and a photoelectric conversion device. The photoelectric conversion device (10) has a groove formation step which applies a pico-second laser to an intermediate contact layer separation groove (15) constituting a photoelectric conversion device (10) and forms a processing groove (15) in a predetermined scan direction by relatively moving the pico-second laser against the intermediate contact layer separation groove (15). In the groove formation step, the pico-second laser is relatively moved so that interference fringes are arranged in parallel in one direction within a radiation range corresponding to the beam diameter of the pico-second laser and the interference fringes are connected in the scan direction.

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