The embodiment of the invention provides a sprinkler of metal organic chemical vapor deposition (MOCVD) equipment as well as a manufacture method and a use method thereof. The manufacture method comprises the following steps of: manufacturing a sprinkler main body; and forming a regenerable protective layer on the surface of the sprinkler main body, wherein the regenerable protective layer is used for protecting the sprinkler main body from etching of chemical reaction gases and/or plasma in the MOCVD process. The formed sprinkler comprises the sprinkler main body and the regenerable protective layer, wherein the regenerable protective layer is located on the external surface of the sprinkler main body and is used for protecting the sprinkler main body. The use method comprises the following steps of: after the sprinkler is used for some time, recycling and regenerating a regenerable material layer to form a recycled protective layer on the surface of the regenerable material layer. By the embodiment of the invention, the sprinkler can be effectively protected, the service life of the sprinkler can be prolonged, and the quality of the formed epitaxial layer and the utilization rate of the MOCVD equipment can be improved.