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发明公开
CN102282107A 锗烷纯化 失效 - 权利终止 转让

锗烷纯化
摘要：
一种用于纯化含有磷化氢的锗烷，以提供纯化的锗烷产品的方法和系统。本发明的一方面是制备含有低于50ppb磷化氢的纯化的锗烷产品的方法，其包括提供磷化氢污染的锗烷气体和氢气的混合物；使锗烷气体氢气混合物通过选择性吸附磷化氢的吸附剂，以及产生纯化的锗烷气体和氢气的混合物；以及从氢气锗烷气体混合物中分离纯化的锗烷气体。
摘要（英）：

A process and system for the purification of germane containing phosphine to provide a purified germane product. One aspect of the present invention is a process for making a purified germane product containing less than 50 ppb of phosphine which comprises providing a phosphine contaminated germane gas hydrogen gas mixture; passing the germane gas hydrogen gas mixture through an adsorbent which selectively adsorbs phosphine and withdrawing therefrom a purified germane gas hydrogen mixture; and separating the purified germane gas from the hydrogen germane gas mixture.

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