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发明授权
CN102332462B 带有绝缘埋层的图像传感器及其制作方法 失效 - 权利终止 转让

带有绝缘埋层的图像传感器及其制作方法
摘要：
本发明提供了一种带有绝缘埋层的图像传感器，所述图像传感器形成于支撑衬底表面，所述支撑衬底的材料是半导体材料，所述图像传感器包括驱动电路区域和光学传感区域，驱动电路区域的支撑衬底中具有顶层半导体层，顶层半导体层通过绝缘埋层与支撑衬底隔离；驱动电路区域中的晶体管形成于顶层半导体层中，光学传感区域中的光学传感器件形成于支撑衬底中并通过P+掺杂的隔离层与支撑衬底电学隔离；所述驱动电路区域和光学传感区域彼此通过绝缘侧墙横向隔离。
摘要（英）：

The invention provides an image sensor with an insulating buried layer. The image sensor is formed on the surface of a support substrate which is made of a semiconductor material, the image sensor comprises a drive circuit zone and an optical sensing zone, and the part of the support substrate in the drive circuit zone has a top semiconductor layer which is isolated from the support substrate through the insulating buried layer; a transistor in the drive circuit zone is formed in the top semiconductor layer, and an optical sensing member in the optical sensing zone is formed in the support substrate and is electrically isolated from the support substrate through a P+ doped separating layer; the drive circuit zone and the optical sensing zone are transversely isolated from each other through an insulating side wall.

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