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CN102422399A 多阶段基板清洁方法和装置 失效 - 权利终止

多阶段基板清洁方法和装置
摘要：
对基板的表面进行清洁材料的第一施加。清洁材料包含用于捕获存在所述基板的表面上的污染物的一种或一种以上粘弹性材料。对所述基板的表面进行冲洗流体的第一施加，从而冲洗所述基板的表面上的清洁材料。同时，执行冲洗流体的第一施加，以在所述基板的表面上留下冲洗流体的残留薄膜。对于其上具有冲洗流体的残留薄膜的基板的表面进行清洁材料的第二施加。然后，对所述基板的表面进行冲洗流体的第二施加，从而冲洗所述基板的表面上的清洁材料。
摘要（英）：

A first application of a cleaning material is made to a surface of a substrate. The cleaning material includes one or more viscoelastic materials for entrapping contaminants present on the surface of the substrate. A first application of a rinsing fluid is made to the surface of the substrate so as to rinse the cleaning material from the surface of the substrate. The first application of the rinsing fluid is also performed to leave a residual thin film of the rinsing fluid on the surface of the substrate. A second application of the cleaning material is made to the surface of the substrate having the residual thin film of rinsing fluid present thereon. A second application of the rinsing fluid is then made to the surface of the substrate so as to rinse the cleaning material from the surface of the substrate.

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