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发明公开
CN102569155A 夹持平面盘状物的装置 有权

夹持平面盘状物的装置
摘要：
本发明公开了一种夹持平面盘状物的装置，涉及半导体技术领域，所述装置包括：圆柱形的旋转主体、两组夹持元件、圆筒形的电磁铁保持架、以及若干电磁铁，所述两组夹持元件通过基座安装于所述旋转主体的侧壁上，所述两组夹持元件通过旋转轴与所述基座连接，在所述夹持元件上设有磁性单元，每组夹持元件中各个夹持元件的磁性单元沿径向的极性相同，所述两组夹持元件之间的磁性单元沿径向的极性相反，在所述基座上与所述夹持元件下部相对处设有张力单元，所述夹持元件能绕旋转轴旋转。本发明通过设置两组夹持元件，在晶片清洗的过程中通过轮换夹持来实现晶片上表面的完全清洗，有效提高了晶片的整体质量。
摘要（英）：

The invention discloses a device for clamping a planar disc and relates to the technical field of semiconductors. The device comprises a cylindrical rotating main body, two groups of clamping elements, a cylindrical electromagnet retainer and a plurality of electromagnets, wherein the two groups of clamping elements are arranged on the side wall of the rotating main body through a base and are connected with the base through a rotating shaft; magnetic units are arranged on the clamping elements; the magnetic unit of each clamping element in each group of clamping elements has the same radial polarity; the magnetic units between the two groups of clamping elements have reverse radial polarities; a tension unit is arranged on the base opposite to the lower parts of the clamping elements; and the clamping elements can rotate around the rotating shaft. Due to the arrangement of the two groups of clamping elements, the upper surface of a wafer can be completely cleaned through alternate clamping in the process of cleaning the wafer, and the overall quality of the wafer is effectively improved.

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