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CN102820418A 一种半导体照明用绝缘导热膜层材料及其制备方法 无效 - 撤回

一种半导体照明用绝缘导热膜层材料及其制备方法
摘要：
一种半导体照明用绝缘导热膜层材料及其制备方法，其特征是依次由基材(1)；铝过渡层(2)和氮化铝膜层(3)构成。其制备方法依次包括离子束清洗基材，沉积铝过渡层和氮化铝层。本发明提供的一种半导体照明用绝缘导热薄膜材料具有良好的膜/基体结合力，高的热导率以及优异的绝缘性能，是一种适合用于半导体照明的金属散热板与芯片之间的绝缘导热材料。
摘要（英）：

The invention discloses an insulated heat-conducting film-layer material for semiconductor illumination and a preparation method of the insulated heat-conducting film-layer material. The insulated heat-conducting film-layer material is characterized by sequentially comprising a substrate (1), an aluminum transition layer (2) and an aluminum nitride film layer (3). The preparation method of the insulated heat-conducting film-layer material sequentially includes the steps of ion beam cleaning of the substrate and deposition of the aluminum transition layer and the aluminum nitride film layer. The insulated heat-conducting film-layer material for semiconductor illumination is good in film/substrate binding force, high in heat conductivity and excellent in insulating property, and is an insulated heat-conducting material which is arranged between a metal heating panel and a chip and suitable for semiconductor illumination.

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