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发明公开
CN103021772A 电极框体以及具备该电极框体的带电粒子束发生装置 有权

电极框体以及具备该电极框体的带电粒子束发生装置
摘要：
本发明提供一种电极框体以及具备该电极框体的带电粒子束发生装置，所述带电粒子束发生装置具备由所述电极框体构成的引出电极，所述电极框体及所述带电粒子束发生装置能够改善更换形成狭缝状开口部的电极棒时的工作效率。电极框体（2）构成带电粒子束引出用的电极，具有使带电粒子束通过的开口部（3）。从一个方向观察电极框体（2）时，在电极框体（2）的开口部（3）周围的一部分上形成有电极棒支承部（7），该电极棒支承部（7）支承横跨开口部（3）配置的电极棒（5）的两端。此外，带电粒子束发生装置具备由所述电极框体（2）构成的引出电极。
摘要（英）：

The invention provides an electrode frame and a charged particle beam generator with the same. The charged particle beam generator comprises a leading-out electrode formed by the electrode frame, wherein the electrode frame and the charged particle beam generator can improve the working efficiency when an electrode rod of a slit shaped opening part is replaced and formed. The electrode for leading out the charged particle beam and formed by the electrode frame (2) comprises an opening part (3) through which the charged particle beam passes. When viewing the electrode frame (2) from one direction, an electrode rod supporting plate (7) is formed on one part of the electrode frame (2) around the opening part (3), and the electrode rod supporting plate (7) supports two ends of the electrode rod (5) across the opening part (3). Moreover, the charged particle beam generator has the leading-out electrode formed by the electrode frame (2).

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