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CN103134993A 层间层内电容的分离方法 无效 - 撤回

层间层内电容的分离方法
摘要：
本发明提出了一种金属层间层内电容的分离方法，以有效的分离金属层间、层内电容。该分离方法主要包括：测量平行金属板结构和combmeander结构的层间电容，测量金属结构combmeander的层内电容，测量平行金属板结构和金属结构comb之间的层间电容，测量平行金属板结构和金属结构meander之间的层间电容；combmeander的层内电容乘二再加上平行金属板结构各与结构comb、meander之间的层间电容，再减去平行金属板结构和combmeander结构之间的总电容，便分离出金属结构combmeander的层内电容。这种金属层间层内电容的分离方法能够更加精确有效的分离出层内电容。
摘要（英）：

The invention provides a separating method of capacitance among layers and in the layers. The separating method aims to effectively separate the capacitance among the layers and in the layers. The separating method mainly comprises measuring the capacitance among the layers of a parallel metal board structure and a combmeander structure, measuring the capacitance in the layer of metal structure combmeander, measuring the capacitance among the layers between the parallel metal board structure and the metal structure comb, and measuring the capacitance among the layers between the parallel metal board structure and the metal structure meander; enabling the capacitance in the layer of the combmeander to be multiplied by two, to be added to the capacitance among the layers between the parallel metal board structure and the structure comb and the structure meander, and to subtract the total capacitance between the parallel metal board structure and the combmeander structure, and separating the capacitance in the layer of the metal structure combmeander. The separating method of the capacitance among the layers and in the layers can separate the capacitance in the layers accurately and effectively.

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