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发明公开
CN103155132A 端口门定位装置及相关的方法 有权

端口门定位装置及相关的方法
摘要：
一种装载端口具有端口门和带开口的框体，所述端口门通过所述开口与用于保持半导体工件的容器的容器门进行交接。在一个实施例中，活动的关闭机构连接到端口门并且限定成相对于端口门和框体两者能够以受控的方式活动。在此实施例中，静止的关闭机构设置在框体上接近于所述开口。在另一个实施例中，静止的关闭机构连接到端口门，并且活动的关闭机构设置在框体上接近于所述开口。在该两个实施例中，活动的关闭机构限定成与静止的关闭机构进行接合，使得活动的关闭机构与静止的关闭机构进行接合的运动在端口门与容器门之间施加闭合力。
摘要（英）：

A loadport has a port door and a frame with an opening through which the port door interfaces with a container door of a container for holding semiconductor workpieces. In one embodiment, a movable closure mechanism is connected to the port door and is defined to be movable in a controlled manner relative to both the port door and the frame. In this embodiment, a stationary closure mechanism is disposed on the frame proximate to the opening. In another embodiment, a stationary closure mechanism is connected to the port door, and a movable closure mechanism is disposed on the frame proximate to the opening. In both embodiments, the movable closure mechanism is defined to engage with the stationary closure mechanism such that movement of the movable closure mechanism to engage with the stationary closure mechanism applies a closing force between the port door and the container door.

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