The invention belongs to a high temperature oxidation resistant film sensor and a production method thereof. The film sensor comprises a to-be-tested alloy substrate and a NiCrAlY alloy transition layer adhered on the top surface of the substrate, an aluminum oxide/aluminum nitride transition layer, an aluminum oxide/aluminum nitride ceramic insulating layer, a sensor function layer composed of electrodes, a Si3N4 isolating layer and an aluminum oxide protective layer arranged on the insulating layer are orderly arranged above the transition layer; the production method comprises surface treatment of alloy substrate, NiCrAlY alloy transition layer settling on the alloy substrate, precipitation, oxidation or nitriding treatment of metal aluminum, setting of Al2O3/AlN ceramic insulating layer, setting of film sensor function layer and Si3N4 isolating layer thereof, and setting of Al2O3 protective layer. The Si3N4 isolating layer in the invention can be used for effectively resisting the oxygen atom dissolved from the insulating layer and aluminum oxide protective layer at high temperature environment to diffuse to the function layer, the stability and reliability of the sensor at high temperature high pressure working environment can be improved, and relative and more accurate basic data is provided for the study and design of a turbine engine.