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CN103276359A 在平板显示器面板的衬底上淀积有机物质的方法 无效 - 撤回

在平板显示器面板的衬底上淀积有机物质的方法
摘要：
本发明提供了在平板显示器面板的衬底上淀积有机物质的方法。有机材料淀积设备可包括内部形成有处理空间的腔室和供给源装置，该供给源装置生成有机源并通过设于所述处理空间中的喷淋头将所述有机源注入并扩散进所述处理空间中。所述衬底由载台装置支撑，该载台装置在所述处理空间中向上和向下移动该衬底以调整所述衬底与所述喷淋头之间的距离。抽取口设于所述处理空间的上部的上端，提供将气流经所述处理空间导向所述载台装置的真空排气路径。这使得厚度均匀的有机薄膜能够利用构造较为简单的设备进行淀积。
摘要（英）：

An organic material deposition method is provided. An organic material deposition apparatus may include a chamber having a processing space formed therein, a source supply device that generates an organic source and injects and diffuses the organic source into the processing space through a shower head provided in the processing space. The substrate is supported by a stage device that moves the substrate upward and downward within the processing space to adjust a distance between the substrate and the shower head. A pumping port provided at an upper positioned at an upper portion of the processing space provides a vacuum exhaust path that directs flow through the processing space toward the stage device. This allows an organic thin film with a uniform thickness to be deposited using an apparatus with a relatively simple configuration.

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