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发明公开
CN103311154A 加热模块及包括其的热处理装置 失效 - 权利终止

加热模块及包括其的热处理装置
摘要：
根据本发明的加热模块，包括：灯，放射光；凹面反射部件，对向于所述灯，并在与所述灯对望的一面具备凹面反射面；透镜模块，插入并设置于所述凹面反射部件，并具备至少一个的透镜；及平板型反射部件，安置为与所述透镜模块对向。由此，根据本发明的实施形态，从灯放射的光会通过凹面反射部件的反射面来进行反射，并通过反射部件及透镜模块进行集光及集热后，照射到基板上。即，相比于以往，可以将大能量的光照射于基板，来对基板进行瞬间加热来提升温度及升温速度，并且可以增加热量可集中的面积。由此具有提升快速热处理工序所需的半导体装置或显示装置的生产性的优点。
摘要（英）：

A heater block according to the present invention comprises a light-emitting lamp; a concave reflecting member that is placed opposite the lamp and has a concave reflecting surface at one surface faced with the lamp; a lens module that is inserted into the concave reflecting member and has at least one lens; and a flat reflecting member that is placed opposite the lens module. According to embodiments of the present invention, light emitted from the lamp is reflected by the concave reflecting member. Then, light and heat are collected from the reflected light by the flat reflecting member and the lens module and are irradiated on a substrate. That is, light having energy greater than a conventional manner is irradiated on the substrate to enhance the instant heating temperature and temperature increasing rate of substrate and to increase a heat-focusing area. Therefore, it has an advantage that the productivity of semiconductor or display device manufacture that requires a rapid thermal process is improved.

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