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CN103380231A 基板输送辊、薄膜制造装置以及薄膜制造方法 无效 - 撤回

基板输送辊、薄膜制造装置以及薄膜制造方法
摘要：
基板输送辊6A构成为在真空中输送基板，具有第1壳体11、内块12以及轴10。第1壳体11具有用于支撑基板的圆筒形的外周面，能与基板同步地旋转。内块12配置在第1壳体11的内部，被禁止与基板同步地旋转。轴10贯通并且支撑内块12。在第1壳体11的内周面与内块12之间形成有间隙部15。在间隙部15，从内块12向第1壳体11的所述内周面导入气体。
摘要（英）：

This roller (6A) is configured so as to convey a substrate in a vacuum. The roller has a first shell (11), an inner block (12), and a shaft (10). The first shell (11) has a cylindrical circumferential surface for supporting the substrate, and can be rotated in synchronism with the substrate. The inner block (12) is provided inside the first shell (11) and is prohibited from rotating in synchronism with the substrate. The shaft (10) penetrates the inner block (12) and supports the inner block. A gap section (15) is formed between the inner circumferential surface of the first shell (11) and the inner block (12). A gas is introduced into the gap section (15) from the inner block (12) toward the inner circumferential surface of the first shell (11).

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