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发明公开
CN103457570A 振动片、电子装置、电子设备以及振动片的制造方法 无效 - 撤回

振动片、电子装置、电子设备以及振动片的制造方法
摘要：
本发明的目的在于，能够提供一种振动片、电子装置、电子设备以及振动片的制造方法，其可在制造振动片时，同时进外形蚀刻和槽部的蚀刻，从而简化制造工序，并且提高槽部与外形的相对位置精度。本发明的振动片（44）的特征在于，具有基部、和从基部突出且具有槽部的振动臂（40），并且在所述振动臂（40）上形成有槽部（42），所述槽部（42）被形成为，在所述振动臂（40）的宽度方向上的长度长于在所述振动臂的长度方向上的长度，且沿着所述振动臂（40）的长度方向而排列配置有多个。
摘要（英）：

The invention aims to provide a vibrator element, an electronic device, an electronic apparatus, and a method of manufacturing the vibrator element. During the manufacturing process of the vibrator element, both the profile and the groove sections of the vibrator element are etched to simplify the manufacturing process and improve the relative positional accuracy of both the groove sections and the profile of the vibrator element. The vibrator element (44) includes a base section, and a vibrating arm (40) projecting from the base section, and having a plurality of groove sections (42), the vibrating arm (40) is provided with the groove sections, and the groove sections (40) are each formed to have a length in a width direction of the vibrating arm (40) longer than a length in a longitudinal direction of the vibrating arm (40), and arranged side by side along the longitudinal direction of the vibrating arm (40).

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