The present invention relates to an inspection unit, a probe card, an inspection device, and a control system for the inspection device. An inspection unit in which a probe card is united with a connection body via a vacuum chamber is provided. The inspection unit prevents flatness of tips of probes provided on the probe card from worsening when the probe card is united with a connection body by suction force (negative pressure) of the vacuum chamber. The inspection unit includes a probe card with probes on a first surface and a connection body united with a second surface of the probe card via a first vacuum chamber. The first chamber is formed with a plurality of chambers.