The invention discloses a micro nano electrostatic force switch which comprises a substrate, a source electrode, a drain electrode, a support electrode, a graphene layer and a source drain electrode connection layer, wherein the substrate comprises an insulation layer and a back electrode; the source electrode and the drain electrode are arranged on the substrate in a first direction; the support electrode is arranged on the substrate in a second direction; the grapheme layer is arranged on the support electrode and is electrically connected with the support electrode; the source drain electrode connection layer extends in the first direction and is electrically connected with the source electrode and the drain electrode. According to the micro nano electrostatic force switch and a manufacturing method thereof, graphene, a single crystal thin layer conductive material, can be adopted as a film bridge material, bias voltage between the electrode and the support electrode is utilized to generate electrostatic force so as to pull down the film bridge, after the film bridge deforms, the source electrode and the drain electrode are connected through a metal layer to form the switch, the threshold voltage is small, a larger drive circuit is not needed, the size of a micro nano mechanical switch can be reduced, and the micro nano electrostatic force switch is compatible with a CMOS.