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发明授权
CN104160338B 具有涡电流制动器的光刻装置 有权

具有涡电流制动器的光刻装置
摘要：
一种光刻装置(10)，包括抑制光刻装置(10)的结构元件(13)的运动的涡电流制动器(30，70)。涡电流制动器(30，70)包括以弧形布置设置的多个磁体以及分别布置在所述磁体中的相邻磁体之间的多个导电片(35，67)。磁体和导电片之间在要制动的方向上的相对运动在导电片中感应出涡电流。
摘要（英）：

A lithography device includes an eddy-current brake for damping the movement of a structural element of the lithography device. The eddy-current brake includes a plurality of magnets disposed in an arc-shaped arrangement, and a plurality of electrically conductive sheets arranged respectively between adjacent ones of the magnets. A relative movement between the magnets and the electrically conductive sheets in a direction to be damped inducing eddy currents in the electrically conductive sheets.

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