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发明公开
CN104247001A 具有馈通结构的基板支撑件 有权

具有馈通结构的基板支撑件
摘要：
在此提供用于提供电流的设备与利用此设备的基板支撑件。在一些实施例中，一种馈通结构可包括：主体，所述主体具有界定一或更多个开口的壁，所述一或更多个开口设置成从第一端穿过所述主体至第二端；一或更多个第一导体与一或更多个第二导体，每个第一导体和第二导体设置在所述壁中而从所述第一端至所述第二端；及多个导电网筛，所述多个导电网筛设置在所述壁中，至少一个导电网筛围绕所述壁的第一区域，所述壁的所述第一区域包括所述一或更多个第一导体，且至少一个导电网筛围绕所述壁的第二区域，所述壁的所述第二区域包括所述一或更多个第二导体，其中多个导电网筛使所述第一区域和所述第二区域与设置在所述第一区域和所述第二区域外面的分别的第一外部电磁场和第二外部电磁场分别实质上电气绝缘。
摘要（英）：

Apparatus for providing electrical currents and substrate supports utilizing the same are provided. In some embodiments, a feedthrough structure may include a body having a wall defining one or more openings disposed through the body from a first end to a second end; one or more first conductors and one or more second conductors each disposed in the wall from the first end to the second end; and a plurality of conductive mesh disposed in the wall, at least one conductive mesh surrounding a first region of the wall including the one or more first conductors and at least one conductive mesh surrounding a second region of the wall including the one or more second conductors, wherein the plurality of conductive mesh substantially electrically insulates the first and second regions from respective first and second external electromagnetic fields respectively disposed outside the first and second regions.

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